Silicon Processing for the VLSI Era Vol. 2: Process Integration by Stanley Wolf
“Silicon Processing for the VLSI Era Vol. 2: Process Integration” by Stanley Wolf is a textbook published in 1995 that covers the subject area of technology and engineering. Specifically, it focuses on the submicron MOSFET in the field of electronics, circuits, and VLSI & ULSI. With 722 pages, this hardcover book presents valuable information on silicon processing techniques in the VLSI era, making it a essential resource for students and professionals in the field.